In order to explore the cultivation technology mode of high yield and water use efficiency of maize in semi humid area, the method of straw returning combined with soil tillage was adopted, and four treatments were set up, including straw rotary ridge tillage (CK), straw deep ploughing returning (SP), straw mulching returning and no tillage (SC) and straw mulching returning and subsoiling (SS). The effects of different treatments on soil moisture, soil temperature, maize yield and water use efficiency were studied. The results showed that: (1) The change of soil water storage showed a single peak curve and double peaks curve in 2018 and 2019, respectively. The soil water storage of all treatments in 2018 and SS treatment in 2019 increased significantly with the increasing of soil depth. Compared with CK treatment, the soil water storage in SC treatment and SS treatment increased by 7.58% to 18.40% and 9.24% to 21.94% in 2018, respectively. (2) The soil temperature of 0—20 cm plough layer increased first and then decreased with the growth period of maize, and decreased gradually with the increasing of soil depth. Straw returning could regulate soil temperature. Compared with CK, the SP treatment increased ground temperature by 0.46 ℃ and 0.21 ℃ in May and June, SC treatment decreased the ground temperature by 1.72 ℃ to 2.79 ℃ from May to July, and increased the ground temperature by 0.22 ℃ in September. (3) In 2018 and 2019, compared with CK, the maize yield of SS, SP and SC treatments increased by 13.88% and 14.82%, 7.59% and 9.12%, 7.42% and 8.50%, respectively. (4) In 2018 and 2019, the water use efficiency of SS, SP and SC treatments increased by 13.79% and 9.75%, 6.11% and 5.93%, 5.67% and 3.83%, respectively. (5) Soil water storage each growth period (time) and 0—60 cm soil layer (space) had significant effects on maize yield. Soil water storage at 0—60 cm and each period except flowering stage in July and below 15 cm had significant positive correlation with water use efficiency. Soil temperature had no significant effect on maize yield and water use efficiency. Straw mulching and subsoiling technology increased soil water storage, improved soil temperature, increased maize yield and water use efficiency, and provided efficient cultivation technology pattern for rain fed agricultural area.